Deposition system and method

ABSTRACT

A deposition system is provided capable of cleaning itself by removing a target material deposited on a surface of a collimator. The deposition system in accordance with the present disclosure includes a substrate process chamber. The deposition includes a substrate pedestal in the substrate process chamber, the substrate pedestal configured to support a substrate, a target enclosing the substrate process chamber, and a collimator having a plurality of hollow structures disposed between the target and the substrate, a vibration generating unit, and cleaning gas outlet.

BACKGROUND

To produce semiconductor devices, a semiconductor substrate, such as asilicon wafer, which is a raw material for the semiconductor devices,must go through a sequence of complicated and precise process steps suchas diffusion, ion implantation, chemical vapor deposition,photolithography, etch, physical vapor deposition, chemical mechanicalpolishing, and electrochemical plating.

The physical vapor deposition (PVD) is generally used to deposit one ormore layers (e.g., thin film) on the semiconductor substrate. Forexample, sputtering, a form of the PVD, is commonly used in thesemiconductor fabrication process to deposit complex alloys and metals,such as silver, copper, brass, titanium, titanium nitride, silicon,silicon nitride, and carbon nitride, on the substrate. The sputteringincludes a target (source), and a substrate (e.g., wafer) positioned inparallel to each other in a vacuum enclosure (e.g., process chamber).The target (cathode) is electrically grounded while the substrate(anode) has positive potential. Argon gas, which is relatively heavy andis a chemically inert gas, is commonly used as the sputtering ionspecies in the sputtering process. When the argon gas is introduced intothe chamber, a plurality of collisions occurs with electrons releasedfrom the cathode. This causes the argon gas to lose its outer electronsand become positively charged argon ions. The positively charged argonions are strongly attracted to the negative potential of the cathodetarget. When the positively charged argon ions strike the targetsurface, the momentum of the positively charged argon ions transfers tothe target material to dislodge one or more atoms (target material)which eventually deposit on the substrate.

The target material atoms exiting the target are deposited on thesubstrate along various traveling paths.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isnoted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIG. 1 is a sectional view of a substrate process chamber in adeposition system according to one or more embodiments in the presentdisclosure.

FIG. 2 is a top view of a collimator according to one or moreembodiments in the present disclosure.

FIG. 3 is a cross-sectional view of the collimator according to one ormore embodiments in the present disclosure.

FIG. 4 is a cross-sectional view of two collimators that are stackedtogether according to one or more embodiments in the present disclosure.

FIG. 5 is a top view of a flux adjusting member according to one or moreembodiments in the present disclosure.

FIG. 6 is a cross-sectional view of the collimator along with across-sectional view of the flux adjusting member according to one ormore embodiments in the present disclosure.

FIG. 7 is a top view of one adjustable hollow structure in the fluxadjusting member according to one or more embodiments in the presentdisclosure.

FIG. 8 is a side exploded view of one adjustable hollow structure in theflux adjusting member according to one or more embodiments in thepresent disclosure.

FIGS. 9 and 10 are side views of one adjusting hollow structureaccording to one or more embodiments in the present disclosure.

FIG. 11 is a flow chart illustrating a method of cleaning the collimatoraccording to one or more embodiments in the present disclosure.

FIG. 12 is a flow chart illustrating a method of adjusting each of theadjustable hollow structures based on the aspect ratio of gap on thesubstrate according to one or more embodiments in the presentdisclosure.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the provided subjectmatter. Specific examples of components and arrangements are describedbelow to simplify the present disclosure. These are, of course, merelyexamples and are not intended to be limiting. For example, the formationof a first feature over or on a second feature in the description thatfollows may include embodiments in which the first and second featuresare formed in direct contact, and may also include embodiments in whichadditional features may be formed between the first and second features,such that the first and second features may not be in direct contact. Inaddition, the present disclosure may repeat reference numerals and/orletters in the various examples. This repetition is for the purpose ofsimplicity and clarity and does not in itself dictate a relationshipbetween the various embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature’s relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly.

Embodiments in accordance with the subject matter described hereininclude a deposition system that is able to deposit a thin film (or alayer) on a substrate (e.g., contact or via structures on the wafer)with an enhanced gap-fill capability provided by a self-cleaningcollimator (hereinafter “smart collimator”). The smart collimatoraccording to one or more embodiments disclosed in the present disclosureis able to clean itself, by removing accumulated target material usingmethods such as applying vibration (e.g., ultrasonic vibration) and/ordirecting scrubbing gas (e.g., purging gas and cleaning gas) to theaccumulated target material. The smart collimator according to one ormore embodiments disclosed in the present disclosure includes a fluxadjusting member that is able to adjust its dimension (e.g., length foreach of adjustable hollow structures in the flux adjusting member) toincrease cleaning effect from the vibration and/or scrubbing gas. Thesmart collimator according to one or more embodiments disclosed in thepresent disclosure includes the flux adjusting member that is able toadjust its dimension (e.g., length for each of adjustable hollowstructures in the flux adjusting member) to deposit (or fill) the targetmaterial into gap patterns (such as steps and trenches) with variousaspect ratios (e.g., high aspect ratio) on the substrate.

In addition, the smart collimator according to one or more embodimentsdisclosed in the present disclosure is able to provide a longer intervalbetween the smart collimator changes due to the self-cleaning features.Moreover, the smart collimator according to one or more embodimentsdisclosed in the present disclosure is able to provide uniformdeposition for all areas on the substrate by adjusting its dimension(e.g., length for each of adjustable hollow structures in the fluxadjusting member). In various embodiments, the flux adjusting member isable to extend the lifetime of the target by adjusting its dimension(e.g., length for each of adjustable hollow structures in the fluxadjusting member). In accordance with various embodiments of the presentdisclosure, the smart collimator, having a plurality of hollowstructures, is positioned between the target and the substrate.

As discussed above, during the sputtering process, the positivelycharged argon ions strike the target surface, and the momentum of thepositively charged argon ions transfers to the target material todislodge one or more atoms therefrom, which are eventually deposited onthe substrate along various traveling paths.

Embodiments of such a deposition system with the smart collimator candeposit (or fill) the target material into gaps (e.g., gap patterns)with a high aspect ratio on the substrate by capturing (or filtering)the target material that is likely to hinder the gap filling beforearriving on the substrate based on the traveling path of the targetmaterial. For example, if the target material traveling to the gap is ona traveling path to the bottom surface of the gap (e.g., verticaldirection), the gap is more likely filled with the material from thebottom surface of the gap. However, if the deposit material traveling tothe gap is on a path directed to the side wall of the gap (e.g.,inclined direction), the gap is more likely to be blocked by depositedtarget material at the top opening of the gap without having the targetmaterial filled all the way to the bottom of the gap. It is helpful toreduce the target material that is likely to block the gap, especiallyfor the gap with a high aspect ratio, by having a plurality of narrowpassages (e.g., hollow structures and adjustable hollow structures)between the target and the substrate.

In various embodiments, each of the adjustable hollow structures in theflux adjusting member included in the smart collimator is configured toextend individually or collectively to remove target material depositedon the smart collimator while the scrubbing gas (and/or vibration) isapplied to the smart collimator. By extending the adjustable hollowstructures, the cleaning effect from the vibration and/or scrubbing gasis increased as explained later in the present disclosure. In someembodiments, each of the adjustable hollow structures in the fluxadjusting member included in the smart collimator is configured toextend and retract repeatedly for a predetermined duration toeffectively remove the target material on the smart collimator.

In some embodiments, each of the adjustable hollow structures in theflux adjusting member included in the smart collimator is configured toextend individually or collectively to capture the target material thatis likely to deposit on the side wall of the gap based on the aspectratio of the gap (e.g., length for the adjustable hollow structuresincreases as the aspect ratio of the gap increases) to improve thegap-fill capability of the deposit system. In some embodiments of thepresent disclosure, by adjusting a respective length for each of theadjustable hollow structures individually or collectively, the depositsystem is able to fill the gap with the high aspect ratio. In someembodiments of the present disclosure, by adjusting the respectivelength for each of the adjustable hollow structures in the fluxadjusting member individually or collectively, the deposit system isable to deposit a uniform layer on the substrate. In some embodiments,by adjusting the respective length for each of the adjustable hollowstructures in the adaptable collimator individually or collectively, thedeposition system is able to stabilize a deposition rate for a longertime - extending the target lifetime.

FIG. 1 is a sectional view of a substrate process chamber 200 in adeposition system 100 according to one or more embodiments in thepresent disclosure.

Referring to FIG. 1 , the substrate process chamber 200 includes asubstrate pedestal 202 that supports a substrate 902 (e.g., wafer) inthe substrate process chamber 200, a target 204 enclosing the substrateprocess chamber 200, a process shield 910 between the target 204 andsubstrate pedestal 202, a smart collimator 500 disposed in or near aninner side of the process shield 910 between the target 204 and thesubstrate pedestal 202, scrubbing gas supply line 920 to the smartcollimator 500, a mass flow controller (MFC) 960 for controlling anamount of the scrubbing gas flowing into the scrubbing gas supply line920, and a vibration driver 970 for controlling the ultrasonic vibrationgenerating units 950 (shown in FIGS. 2 and 3 ).

FIG. 2 is a top view of a smart collimator 500 according to one or moreembodiments in the present disclosure.

Referring to FIG. 2 , the smart collimator 500 includes a scrubbing gasreceiving port 930 (in FIG. 1 ), a plurality of hollow structures 502,(embedded) microchannels 940 for directing the scrubbing gas forcleaning the smart collimator 500 (shown in FIG. 3 ), and (embedded)ultrasonic vibration generating units 950 for cleaning the smartcollimator 500 (shown in FIG. 3 ). In various embodiments of the presentdisclosure, the plurality of hollow structures 502 is clustered toprovide a plurality of openings 504 where the material from the target204 passes through. In some embodiments, each of the ultrasonicvibration generating units 950 is connected directly or indirectly withthe vibration driver 970 which is configured to control the ultrasonicvibration generating units 950 based on a vibration control signal froma controller 300 in FIG. 1 . In some embodiments of the presentdisclosure, the smart collimator 500 includes a flux adjusting member700 (shown in FIGS. 5 and 6 ) and a flux adjusting member driver 980 inFIG. 1 that are used to control an amount of the target materialdeposited on the substrate 902 by adjusting an amount of the targetmaterial on the inclined traveling path deposited on the substrate 902based on a configuration signal from the controller 300. In theillustrated embodiment shown in FIG. 2 , the smart collimator 500 iscoupled to the process shield 910 using four coupling locations 508. Insome embodiments, the coupling locations 508 include the ultrasonicvibration generating units 950. In some embodiments, the smartcollimator 500 is couple to the process shield 910 using less than fourcoupling locations 508 or more than four coupling locations 508.

FIG. 3 is a cross-sectional view (I-I') of the smart collimator 500according to one or more embodiments in the present disclosure.

Referring to FIG. 2 and FIG. 3 , the smart collimator 500 includes themicrochannels 940 that are embedded in the side walls surrounding thenarrow passages of the smart collimator 500, scrubbing gas outlets 942where the scrubbing gas is released for cleaning the hollow structures502 by removing the accumulated target material, and the ultrasonicvibration generating units 950 embedded in the side walls surroundingthe narrow passages of the smart collimator 500 for cleaning the hollowstructures 502 by removing accumulated target material.

As illustrated in FIG. 3 , the microchannels 940 are integrated into theside walls that form the openings 504 and serve as gas lines connectingbetween the scrubbing gas receiving port 930 and the scrubbing gasoutlets 942 in some embodiments of the present disclosure. Any suitablegas can be used to remove the accumulated target material. In someembodiments, chemically inactive gas is used as the scrubbing gas. Insome embodiments, nitrogen (N2) is used as the scrubbing gas. In someembodiments of the present disclosure, the microchannels 940 are notembedded into the side walls. As a non-limiting example, themicrochannels 940 (e.g., micro gas lines) are separated from the sidewalls but surrounded by the inner side of the narrow passages.

As illustrated in FIG. 3 , the ultrasonic vibration generating units 950are integrated into the side walls that form the openings 504. Anysuitable ultrasonic vibration generating units 950 that can serve aselectro-mechanical converters are used to generate ultrasonic vibrationat 20 kHz frequency or above. In some embodiments, the ultrasonicvibration generating units 950 include transducers based on at least onepiezoelectric material. In some embodiments, the ultrasonic vibrationgenerating units 950 include transducers based on at least one magneticmaterial or any other suitable materials that can generate appropriatemagnitude of vibration that can be used for removing accumulated targetmaterial from the hollow structures 502. In some embodiments, theultrasonic vibration generating units 950 are not embedded into the sidewalls but installed or mounted on any suitable locations such as thecoupling locations 508. In some embodiments, the ultrasonic vibrationgenerating units 950 generate vibration below 20 kHz.

Referring to FIGS. 1, 2, and 3 , the smart collimator 500 includes theplurality of hollow structures 502 configured to receive the scrubbinggas and to direct (or channel) the scrubbing gas to where the materialfrom target 204 is accumulated (e.g., the inner side surfaces of thehollow structures 502). In various embodiments, the smart collimator 500includes the ultrasonic vibration generating units 950 that generatevibration to remove the accumulated target material. In variousembodiments of the present disclosure, the plurality of hollowstructures 502 is clustered to provide a plurality of openings 504 wherethe material from the target 204 passes through. In other words, thehollow structures 502 provide narrow passages between the target 204 andthe substrate 902. Based on the length of the narrow passages, thelikelihood of filling gap patterns with a high aspect ratio on thesubstrate 902 changes. For example, the passages with a longer lengthprovide a better result for filling the gaps with the high aspect ratio.The amount of the material deposited on the substrate 902 changes basedon the length of the narrow passages. For example, the passages with ashorter length allow more material from the target 204 to deposit on thesubstrate 902. In some embodiments of the present disclosure, the smartcollimator 500 includes the coupling locations 508 that are used toattach the smart collimator 500 to the inner side of the process shield910. In the illustrated embodiment in FIG. 2 , the coupling locations508 include the scrubbing gas receiving port 930 in various embodimentsof the present disclosure. In some embodiments, the coupling locations508 include the ultrasonic vibration generating units 950 which areconfigured to apply the vibration to the hollow structures 502.

FIG. 4 is a cross-sectional view of two smart collimators 500 stackedtogether according to one or more embodiments in the present disclosure.

Referring to FIG. 4 , the smart collimator 500 can be stacked on or overanother smart collimator 500 to adjust a total length of the hollowstructures 502 (e.g., narrow passages) through which the target materialpasses before impinging on the substrate 902. As discussed above, thepassages with a longer length provide a better result for filling thegap with the high aspect ratio on the substrate 902. Accordingly, insome embodiments, a fabrication operator can adjust the length bystacking one or more smart collimators 500 to improve the capability offilling the gap with the high aspect ratio on the substrate 902. Asdiscussed above, the passages with a shorter length allow more materialfrom the target 204 to deposit on the substrate 902. Accordingly, insome embodiments, the fabrication operator can adjust the length byremoving one or more smart collimators 500 to increase the amount oftarget material deposited on the substrate 902.

Referring to FIGS. 1, 2, 3, and 4 , each of the smart collimators 500includes the microchannels 940 for distributing the scrubbing gas, thescrubbing gas outlets 942 where the scrubbing gas is released forremoving the accumulated target material from the hollow structures 502(e.g., inner sides surrounding the openings 504), and the ultrasonicvibration generating units 950 for removing the accumulated depositedmaterial in the hollow structures 502 (e.g., inner sides surrounding theopenings 504). In some embodiments, the amount of scrubbing gas suppliedto the microchannels 940 is regulated based on the scrubbing gas signalfrom a controller 300. In some embodiments, the vibration generated ateach of the ultrasonic vibration generating units is controlled by thevibration control signal transmitted from the controller 300.

FIG. 5 is a top view of the flux adjusting member 700 according to oneor more embodiments in the present disclosure. FIG. 6 is across-sectional view of the smart collimator 500 (I-I') along with across-sectional view of the flex adjusting member 700 (II-II') accordingto one or more embodiments of the present disclosure.

Referring to FIG. 5 and FIG. 6 , the flux adjusting member 700 includesa plurality of adjustable hollow structures 702 configured to adjust arespective length for each of the adjustable hollow structures 702 basedon a configuration control signal from a controller 300 (e.g., extend orretract to a determined length). In various embodiments of the presentdisclosure, the plurality of adjustable hollow structures 702 isclustered to provide a plurality of openings 704 where the material fromthe target 204 passes through. In other words, the adjustable hollowstructures 702 provide narrow passages between the target 204 and thesubstrate 902. In some embodiments, each of the adjustable hollowstructures 702 overlaps a portion of the underlying substrate 902. Alength for each of the narrow passages (adjustable hollow structure 702)effect a corresponding area on the substrate 902 at which the targetmaterial is directed. For example, by extending one of the adjustablehollow structures 702, target material is directed at a correspondingsurface area of the substrate 902 with less target material traveling inan inclined direction, accordingly, a gap with a high aspect ratio onthe corresponding area on the substrate 902 is likely to fill withouthaving void or overhang issues. In addition, by retracting one of theadjustable hollow structures 702, target material including more targetmaterial traveling in an inclined direction is deposited on thecorresponding area on the substrate 902. In various embodiments, toincrease the amount of the material from the target 204 that passesthrough the openings 704, the plurality of openings 704 includes theopenings 704 in various sizes. In some embodiments of the presentdisclosure, the flux adjusting member 700 includes a coupling mechanism706 that is used to attach the flux adjusting member 700 to the innerside of the process shield 910. In the illustrated embodiment shown inFIG. 5 , the flux adjusting member 700 is coupled to the process shield910 using four screw coupling locations 708. In some embodiments, thecoupling mechanism 706 includes the ultrasonic vibration generatingunits 950.

Referring to FIG. 6 , the smart collimator 500 includes the fluxadjusting member 700 in some embodiments of the present disclosure. Asillustrated in FIG. 6 , the flux adjusting member 700 is disposed on thebottom side of the smart collimator 500 in some embodiments. In variousembodiments, each of the adjustable hollow structures 702 in the fluxadjusting member 700 is adjusted based on the configuration controlsignal from the controller 300. Based on the configuration controlsignal from the controller 300, the respective length for each of theadjustable hollow structures 702 can be adjusted.

In the illustrated embodiment shown in FIG. 6 , the openings 504 of thesmart collimator 500 and the openings 704 of the flux adjusting member700 are corresponding to each other, i.e., they are aligned with eachother and the concentric with each other.

In the illustrated embodiment shown in FIG. 6 , the respective lengthfor each of the adjustable hollow structures 702 is adjusted such thatthe adjustable hollow structures 702 at location A are longer than theadjustable hollow structures 702 at locations B, C, and D. In theillustrated embodiment, the adjustable hollow structures 702 at locationB are longer than the adjustable hollow structures 702 at locations Cand D. The adjustable hollow structures 702 at location C are longerthan the adjustable hollow structures 702 at location D in theillustrated embodiment.

In the illustrated embodiment, the length for each of the adjustablehollow structures 702 is incrementally changed based on theconfiguration control signal from the controller 300. However, thepresent disclosure does not limit that the length of the adjustablehollow structures 702 changes incrementally. In various embodiments,each of the hollow adjustable structures 702 is retracted or extended toa determined length.

Flux adjusting member 700 configured as illustrated in FIG. 6 provides agreater step coverage for a high aspect ratio gap at the center of thesubstrate 902 (corresponding to location A) than a step coverage for ahigh aspect ratio gap at the periphery area of the substrate 902(corresponding to locations B, C, and D) since the hollow structures 502and the adjustable hollow structures 702 at the location A of the smartcollimator 500 capture or block more target material that is likely todeposit on the side wall of the gap. However, the flux adjusting member700 configured as illustrated in FIG. 6 provides a higher depositionrate at the periphery area of the substrate 902 (corresponding tolocations B, C, and D) than the center area of the substrate 902(corresponding to location A) since less material is blocked or capturedat locations B, C, and D of the flux adjusting member 700 (e.g.,periphery area of the smart collimator 500). In other words, therespective length for each of the adjustable hollow structures 702 inthe flux adjusting member 700 can be adjusted based on a size of the gapaspect ratio, a target uniformity of the thin film 904 on the substrate902, and/or an amount of target material planning to deposit on each ofthe corresponding areas on the substrate 902.

The embodiment illustrated in FIG. 1 illustrates that the substratepedestal 202 is in a process position (e.g., upper position) supportingthe substrate 902 during a sputtering process. At this time, the thinfilm 904 is formed with the target material from the target 204 (andreactive gas supplied to the substrate process chamber 200) on thesubstrate 902. In various embodiments, the smart collimator 500(equipped with the flux adjusting member 700) is capable of adjustingthe respective length for each of the adjustable hollow structures 702(e.g., extend or retract to a determined length) based on the thicknessmeasurements collected from the substrate 902 at a plurality oflocations after the deposition at the substrate process chamber 200 iscompleted.

As discussed above, in various embodiments of the present disclosure,the flux adjusting member 700 included in the smart collimator 500 iscapable of adjusting the respective length for each of the adjustablehollow structures 702 to provide the uniform deposition rate at alllocations on subsequent substrates. For example, at least one of theadjustable hollow structures 702 can be extended to reduce thedeposition rate (e.g., amount of the target material) at a correspondinglocation (e.g., where the substrate process chamber 200 depositedexcessive amount of material on the substrate 902) for the subsequencesubstrates. In addition, at least one of the adjustable hollowstructures 702 can be retracted to increase the deposition rate (amountof the deposited material) at a corresponding location (e.g., where thesubstrate process chamber 200 previously deposited less amount ofmaterial on the substrate 902) on the subsequent substrates. Byincreasing and/or decreasing the deposition rates at differentcorresponding locations on the subsequent substrates, the substrateprocess chamber 200 can provide uniform deposition on the subsequentsubstrates.

Referring to FIGS. 1 and 6 , FIG. 6 illustrates the flux adjustingmember 700 configured for the subsequent substrates for uniformdeposition after thickness measurement (e.g., uniformity measurement) iscompleted on the thin film 904 illustrated in FIG. 1 . Based on thethickness measurement, a respective length for each of the adjustablehollow structures 702 is determined. As discussed above, the adjustablehollow structures 702 can be extended to reduce the deposition rate(e.g., amount of the target material) at a corresponding location(center area for this case), and the adjustable hollow structures 702can be retracted to increase the deposition rate (amount of thedeposited material) at a corresponding location (wafer edge area forthis case).

By adjusting the respective length for one or more of the adjustablehollow structures 702 in the flux adjusting member 700, less targetmaterial is deposited on the flux adjusting member 700 that can reducethe production yield (e.g., chamber particle issue due to particlespeeled from a collimator). In addition, by adjusting the respectivelength for one or more of the adjustable hollow structures 702 in theflux adjusting member 700, more target material is actually utilized fordeposition.

As discussed above, in various embodiments, the flux adjusting member700 is capable of adjusting the respective length for each of theadjustable hollow structures 702 to improve step coverage for fillingthe high aspect ratio gap in the patterns on the substrate 902. Forexample, the adjustable hollow structures 702 in the flux adjustingmember 700 can be extended collectively to improve the step coverage forthe high aspect ratio gap in the patterns on the substrate 902. Asindicated above, by extending the adjustable hollow structures 702, thedeposition rate of the substrate process chamber 200 is reduced. So, theadjustable hollow structures 702 in the flux adjusting member 700 can beretracted collectively to a certain length for filling low aspect ratiogap in the patterns on the substrate 902 to maintain a certaindeposition rate for production throughput.

Again, by adjusting the respective length for one or more of theadjustable hollow structures 702 in the flux adjusting member 700, lesstarget material is deposited on the flux adjusting member 700 that canreduce the production yield (e.g., chamber particle issue due toparticles peeled from the collimator). In addition, by adjusting therespective length for one or more of the adjustable hollow structures702 in the flux adjusting member 700, more target material is actuallyutilized for deposition.

As discussed above, in various embodiments, the flux adjusting member700 is capable of adjusting the respective length for each of theadjustable hollow structures 702 to stabilize the deposit rate tomaintain uniform deposition for all areas on the substrate 902. Forexample, the adjustable hollow structures 702 can be extended orretracted to stabilize the deposition rate based on the target erosionprofile. By retracting (or maintaining) the length of the adjustablehollow structures 702 corresponding to locations where less targetmaterial remains on the target 204 (which leads to less materialsexiting from the target surface), and by extending the length of theadjustable hollow structures 702 corresponding to locations where moretarget material remains on the target 204 (which leads more materialexiting the target surface), the substrate process chamber 200 canmaintain the deposition rate while maintaining the uniformity of thelayer deposited in the substrate process chamber 200.

Again, by adjusting the respective length for one or more of theadjustable hollow structures 702 in the flux adjusting member 700, lesstarget material is deposited on the flux adjusting member 700 that canreduce the production yield (e.g., chamber particle issue due toparticles peeled from a collimator). In addition, by adjusting therespective length for one or more of the adjustable hollow structures702 in the flux adjusting member 700, more target material is utilizedfor deposition.

As discussed above, the smart collimator 500 is configured to apply thescrubbing gas to remove the accumulated target material from the smartcollimator 500 in some embodiments of the present disclosure. In someembodiments, the smart collimator 500 is configured to apply(ultrasonic) vibration to shake off the accumulated target material fromthe smart collimator 500. In some embodiments, the scrubbing gas and/orvibration is applied to the smart collimator 500 based on predeterminedcleaning frequency. For non-limiting example, in some embodiments, thescrubbing gas and/or vibration is applied based on power on time of thesubstrate process chamber 200. In some embodiments, the scrubbing gasand/or vibration is applied based on a plasma on time of the substrateprocess chamber 200. In some embodiments, the scrubbing gas and/orvibration is applied based on periodic interval of wafer counts. In someembodiments, the scrubbing gas and/or vibration is applied based on thelifetime of the smart collimator 500. In some embodiments, a cleaningrecipe that includes one or more cleaning steps (e.g., scrubbing gascleaning step and vibration cleaning step) is used to clean the smartcollimator 500.

Controller 300 controls scrubbing gas supplied to the hollow structures502 (and the adjustable hollow structure 702) based on flow rate (e.g.,standard cubic centimeters per minute) and flow time by transmitting thescrubbing gas control signal to the mass flow controller (MFC) 960. Insome embodiments, the controller 300 controls vibration time, magnitudeof vibration and/or waveform of vibration for each of the ultrasonicvibration generating units 950 by transmitting the vibration controlsignal to the vibration driver 970.

In some embodiments of the present disclosure, the controller 300 runs asmart collimator cleaning recipe which includes the scrubbing gascleaning step that transmits the scrubbing gas control signal from thecontroller 300 to the mass flow controller 960. In some embodiments, thecontroller 300 runs the cleaning recipe which includes the vibrationcleaning step that transmits the vibration control signal from thecontroller 300 to the vibration driver 970. In some embodiments, thecontroller 300 runs the cleaning recipe which includes both the gasscrubbing cleaning step and the vibration cleaning step.

In accordance with one or more embodiments, the controller 300 includesan input circuitry 302, a memory 304, a processor 306, and an outputcircuity 308. See FIG. 1 . Controller 300 includes the (computer)processor 306 configured to perform the various functions and operationsdescribed herein including receiving input data from various datasources (e.g., automated material handling system (AMHS) and measurementdevices such as metrology tools) via the input circuity 302 andtransmitting output data (e.g., scrubbing gas control signal andvibration control signal) to components in the substrate process chamber200 (e.g., vibration driver 970 and mass flow controller 960) thatregulate the scrubbing gas flow and/or ultrasonic vibration for removingthe accumulated target material in the smart collimator 500.

In various embodiments, the controller 300 transmits the scrubbing gascontrol signal and/or vibration control signal based on depositionuniformity data received from measurement devices such as the metrologytool capable of measuring thickness and thickness uniformity of filmsdeposited on the substrate. In some embodiments, after the depositionprocess is completed on the substrate 902 at the substrate processchamber 200, uniformity of thin film 904 deposited on the substrate 902is measured by the metrology tool.

In various embodiments, when the controller 300 determines that the thinfilm 904 deposited on the substrate 902 has a uniformity that is equalto or below the predetermined uniformity threshold value, the controller300 transmits the scrubbing gas control signal and/or vibration controlsignal. In some embodiments, the controller 300 transmits the scrubbinggas control signal to the mass flow controller 960 to remove theaccumulated target material that is deposited on the narrow passages inthe hollow structures 502. In some embodiments, the controller 300transmits the vibration control signal to the vibration driver 970 thatcontrols the ultrasonic vibration generating units 950. Ultrasonicvibration generating units 950 are used to shake off the accumulatedtarget material from the narrow passages in the hollow structures 502.In various embodiments, the controller 300 transmits the scrubbing gascontrol signal and the vibration control signal together to remove theaccumulated target material from the narrow passage in the hollowstructures 502.

In some embodiments, the controller 300 transmits the configurationcontrol signal to the flux adjusting member driver 980 connected to theflux adjusting member 700 during the cleaning procedure (e.g., applyingthe ultrasonic vibration and the scrubbing gas) so the adjustable hollowstructures 702 are in a proper clean position. For non-limiting example,the smart collimator 500 is configured such that the adjustable hollowstructures 702 extend to a cleaning length (e.g., maximum length) so theinner sides of the adjustable hollow structures 702 can be cleaned bythe scrubbing gas and/or the vibration. In some embodiments, the smartcollimator 500 is configured such that the adjustable hollow structures702 are extended and retracted repeatedly for a predetermined durationto effectively remove the accumulated target material. In someembodiments, this extend and retract movement creates vibration that canbe utilized for cleaning the smart collimator 500.

In various embodiments, the controller 300 transmits the scrubbing gascontrol signal and/or vibration control signal based on a predeterminedcleaning frequency. For non-limiting example, in some embodiments, thecontroller 300 transmits the scrubbing gas control signal and/orvibration control signal based on periodic intervals of substrateprocess chamber power on time. In some embodiments, the controller 300transmits the scrubbing gas control signal and/or vibration controlsignal based on periodic intervals of plasma on time in the substrateprocess chamber 200. In some embodiments, the controller 300 transmitsthe scrubbing gas control signal and/or vibration control signal basedon periodic intervals of wafer counts. In some embodiments, thecontroller 300 transmits the scrubbing gas control signal and/orvibration control signal based on periodic intervals of the lifetime ofthe smart collimator 500. In some embodiments, the controller 300transmits the scrubbing gas control signal and/or vibration controlsignal based on the condition of the substrate process chamber 200. Insome embodiments, the controller 300 transmits the scrubbing gas controlsignal and/or vibration control signal based on two more conditionslisted above.

As discussed above, the controller 300 transmits the scrubbing gascontrol signal and/or vibration control signal based on the condition ofthe substrate process chamber 200 in some embodiments. For non-limitingexample, before running a lot of substrates 902 in a front openingunified pod (FOUP), one or more particle check wafers (mechanical dummywafers) are cycled through the substrate process chamber 200. Based onthe particle count result measured from the particle check wafers, thecontroller 300 determines the condition of the substrate process chamber200. If the controller 300 determines that the particle count is equalto or more than the predetermined value, the controller 300 transmitsthe scrubbing gas control signal and/or vibration control signal.

Memory 304 stores information received via the input circuitry 302 andthe processed data from the processor 306. Memory 304 may be or includeany computer-readable storage medium, including, for example, read-onlymemory (ROM), random access memory (RAM), flash memory, hard disk drive,optical storage device, magnetic storage device, electrically erasableprogrammable read-only memory (EEPROM), organic storage media, or thelike. Output circuitry 308 transmits the vibration control signal and/orscrubbing gas control signal.

In some embodiments, the processor 306 includes an artificialintelligence controller 307 that includes a cleaning timing controller312 and a cleaning recipe generator 314. Cleaning timing controller 312is used to determine and/or predict proper timing for running thecleaning recipe for cleaning the smart collimator 500 by employing oneor more artificial intelligence techniques. Cleaning recipe generator314 is used to generate and/or modify the cleaning recipe by employingone or more artificial intelligence techniques.

“Artificial intelligence” is used herein to broadly describe anycomputationally intelligent systems and methods that can learn knowledge(e.g., based on training data), and use such learned knowledge to adapttheir approaches for solving one or more problems, for example, bymaking inferences based on a received input such as measurements (e.g.,particle measurement data and uniformity data) received via the inputcircuitry 302. Artificially intelligent machines may employ, forexample, neural network, deep learning, convolutional neural network,Bayesian program learning, and pattern recognition techniques to solveproblems such as determining the timing for running the cleaning recipefor cleaning the smart collimator 500. Further, artificial intelligencemay include any one or combination of the following computationaltechniques: constraint program, fuzzy logic, classification,conventional artificial intelligence, symbolic manipulation, fuzzy settheory, evolutionary computation, cybernetics, data mining, approximatereasoning, derivative-free optimization, decision trees, and/or softcomputing. Employing one or more computationally intelligent techniques,the cleaning timing controller 312 may learn to determine and/or predictthe proper timing for running the cleaning recipe.

In some embodiments, the cleaning timing controller 312 is trained basedon training data 303 stored in the memory 304. In some embodiments, thetraining data 303 includes predetermined cleaning timings for variousconditions. For non-limiting example, the training data 303 includes thepredetermined cleaning timing for running the cleaning recipecorresponding to different conditions such as uniformity of depositedthin film 904, power on time of the substrate process chamber 200,plasma on time of the substrate process chamber 200, wafer counts, thelifetime of the smart collimator 500, and any combinations thereof.

In some embodiments, based on the training data 303, the cleaning timingcontroller 312 determines the proper timing for running the clean recipethat includes transmitting the scrubbing gas control signal and/or thevibration control signal.

In some embodiments, the cleaning timing controller 312 learns to modifyits behavior in response to the training data 303 and obtain or generatecleaning timing knowledge which is stored in a cleaning timing database305. The cleaning recipe timing knowledge includes result of operatingthe deposition system 100 using the training data 303 such as thin filmuniformity and corresponding training data 303 used, condition of thesubstrate process chamber 200 (e.g., particle count) and correspondingtraining data 303 used, and fabrication yield and corresponding trainingdata 303 used.

In some embodiments, based on the cleaning timing knowledge, thecleaning timing controller 312 makes corrections to the training data303 to optimize or improve the training data 303 to a particularsubstrate process chamber 200 and/or smart collimator 500. In otherwords, the cleaning timing controller 312 continuously modifies itsbehavior in response to the training data 303 and the cleaning timingdatabase 305 and updates the cleaning timing in the cleaning timingdatabase 305.

As discussed above, “artificial intelligence” is used herein to broadlydescribe any computationally intelligent systems and methods that canlearn knowledge (e.g., based on training data), and use such learnedknowledge to adapt their approaches for solving one or more problems,for example, by making inferences based on a received input such asmeasurements (e.g., particle measurement data and uniformity data)received via the input circuitry 302. Artificially intelligent machinesmay employ, for example, neural network, deep learning, convolutionalneural network, Bayesian program learning, and pattern recognitiontechniques to solve problems such as determining one or more cleaningsteps included in the cleaning recipe. Further, artificial intelligencemay include any one or combination of the following computationaltechniques: constraint program, fuzzy logic, classification,conventional artificial intelligence, symbolic manipulation, fuzzy settheory, evolutionary computation, cybernetics, data mining, approximatereasoning, derivative-free optimization, decision trees, and/or softcomputing. Employing one or more computationally intelligent techniques,the cleaning recipe generator 314 may learn to configure the cleaningrecipe

In some embodiments, the cleaning recipe generator 314 is trained basedon training data 303 stored in the memory 304. In some embodiments, thetraining data 303 includes predetermined leaning recipes that aresuitable to remove the target material deposit on the smart collimator500 under various conditions. For non-limiting example, the trainingdata 303 includes the predetermined cleaning recipes corresponding todifferent conditions such as uniformity of deposited thin film 904,power on time of the substrate process chamber 200, plasma on time ofthe substrate process chamber 200, wafer counts, the lifetime of thesmart collimator 500, and any combinations thereof.

In some embodiments, based on the training data 303, the cleaning recipegenerator 314 determines the proper cleaning recipe including at leastone of the cleaning steps (e.g., applying the scrubbing gas and applyingthe vibration). In some embodiments, the cleaning recipe generator 314determines cleaning duration for each of the cleaning steps (e.g.,scrubbing gas and vibration) based on the conditions described below.

In some embodiments, the cleaning recipe generator 314 learns to modifyits behavior in response to the training data 303 and obtain or generatecleaning recipe knowledge which is stored in a cleaning recipe database318. The cleaning recipe timing knowledge includes result of operatingthe deposition system 100 using the training data 303 such as thin filmuniformity and corresponding training data 303 used, condition of thesubstrate process chamber 200 (e.g., particle count) and correspondingtraining data 303 used, and/or fabrication yield and correspondingtraining data 303 used.

In some embodiments, based on the cleaning recipe knowledge, thecleaning recipe generator 314 makes corrections to the training data 303to optimize or improve the training data 303 to a particular substrateprocess chamber 200 and/or smart collimator 500. In other words, thecleaning recipe generator 314 continuously modifies its behavior inresponse to the training data 303 and the cleaning recipe database 318and updates the cleaning recipe in the cleaning recipe database 318.

In some embodiments, the controller 300 controls the respective lengthfor each of the adjustable hollow structures 702 in the flux adjustingmember 700 (e.g., extend and retract). As discussed above, in someembodiments, the controller 300 includes an input circuitry 302, amemory 304, a processor 306, and an output circuitry 308. In someembodiments, the controller 300 includes the (computer) processor 306configured to perform the various functions and operations describedherein including receiving input data from various data sources (e.g.,measurement data from the thin film 904, measurement data from thetarget 204, and gap aspect ratio information from the AMHS) via theinput circuity 302 and transmitting output data (e.g., configurationcontrol signal) to the flux adjusting member driver 980 via the outputcircuitry 308. Input circuitry 302 receives the thickness measurement,aspect ratio measurement, and/or target erosion profile measurementmeasured by respective measurement devices.

In some embodiments of the present disclosure, the thin film thicknessmeasurement is taken at one location or a plurality of (predetermined orrandom) locations on the substrate 902. In some embodiments, the inputcircuitry 302 also receives process specification information such as atarget thin film thickness. Details of the input circuitry 302, memory304, and output circuitry 308 will be provided later in the presentdisclosure.

In some embodiments, the processor 306 determines at least one area orlocation (e.g., center area, wafer edge area, and area between thecenter area and the wafer edge area) where the thickness of the thinfilm 904 is out of or within the process specification. Based on thedetermination, the processor 306 determines a precise length for each ofthe adjustable hollow structures 702 (or relevant adjustable hollowstructures 702) in the flux adjusting member 700. In some embodiments,the processor 306 determines a precise length for each of the adjustablehollow structures 702 (or relevant adjustable hollow structures 702) inthe flux adjusting member 700 based on the aspect ratio measurement. Insome embodiments, the processor 306 determines a precise length for eachof the adjustable hollow structures 702 (or relevant adjustable hollowstructures 702) in the flux adjusting member 700 based on the targeterosion profile measurement.

Memory 304 stores information received via the input circuitry 302 andthe processed data such as the determined location (area) informationfrom the processor 306. Memory 304 may be or include anycomputer-readable storage medium, including, for example, read-onlymemory (ROM), random access memory (RAM), flash memory, hard disk drive,optical storage device, magnetic storage device, electrically erasableprogrammable read-only memory (EEPROM), organic storage media, or thelike. Output circuitry 308 transmits the configuration control signal(e.g., extend or retract) for the flux adjusting member 700 based on themeasurement data.

In some embodiments, the processor 306 includes a configurationgenerator (artificial intelligence controller) 316 that is used todetermine the respective length for each of the adjustable hollowstructures 702 by employing one or more artificial intelligencetechniques.

“Artificial intelligence” is used herein to broadly describe anycomputationally intelligent systems and methods that can learn knowledge(e.g., based on training data), and use such learned knowledge to adapttheir approaches for solving one or more problems, for example, bymaking inferences based on a received input such as measurements (e.g.,target erosion measurement data, aspect ratio measurement data, anduniformity measurement data) received via the input circuitry 302.Artificially intelligent machines may employ, for example, neuralnetwork, deep learning, convolutional neural network, Bayesian programlearning, and pattern recognition techniques to solve problems such asdetermining the respective length for each of the adjustable hollowstructures 702. Further, artificial intelligence may include any one orcombination of the following computational techniques: constraintprogram, fuzzy logic, classification, conventional artificialintelligence, symbolic manipulation, fuzzy set theory, evolutionarycomputation, cybernetics, data mining, approximate reasoning,derivative-free optimization, decision trees, and/or soft computing.Employing one or more computationally intelligent techniques, theconfiguration generator 316 may learn to determine the respective lengthfor each of the adjustable hollow structures 702 (or relevant adjustablehollow structures 702) in the flux adjusting member 700.

In some embodiments, the configuration generator 316 is trained based ontraining data 303 stored in the memory 304. In some embodiments, thetraining data 303 includes predetermined lengths for the adjustablehollow structure 702 for various conditions. For a non-limiting example,the training data 303 includes the predetermined length for each of theadjustable hollow structures 702 corresponding to different target 204thickness, different aspect ratios of gap, different thin film 904thickness, and any combinations thereof.

In some embodiments, based on the training data 303, the configurationgenerator 316 controls and/or adjusts the respective length for each ofthe adjustable hollow structures 702 (or relevant adjustable hollowstructures 702).

In some embodiments, the configuration generator 316 learns to modifyits behavior in response to the training data 303 and obtain or generateconfiguration knowledge which is stored in a configuration database 320.The configuration knowledge includes result of operating the depositionsystem 100 using the training data 303 such as thin film uniformity andcorresponding training data 303 used, fabrication yield for gap fillprocess and corresponding training data 303 used, and target life-timeand corresponding training data 303 used.

In some embodiments, based on the configuration knowledge, theconfiguration generator 316 makes corrections to the training data 303to optimize or improve the training data 303 to a particular substrateprocess chamber 200. In other words, the configuration generator 316continuously modifies its behavior in response to the training data 303and the configuration database 320 and updates the configurationknowledge in the configuration database 320.

FIG. 7 is a top view of one adjustable hollow structure 702 in the fluxadjusting member 700 according to one or more embodiments in the presentdisclosure.

FIG. 8 is a side exploded view of one adjustable hollow structure 702 inthe flux adjusting member 700 according to one or more embodiments inthe present disclosure.

FIGS. 9 and 10 are side views of one adjustable hollow structure 702 inthe flux adjusting member 700 according to one or more embodiments inthe present disclosure.

Referring to FIGS. 7-10 , the adjustable hollow structure 702 includesan inner hollow member 712 and an outer hollow member 716. In someembodiments, to adjust the length of the adjustable hollow structure702, the inner hollow member 712 is configured to rotate in the outerhollow member 716. As the inner hollow member 712 is rotated in a firstdirection, the length of the adjustable hollow structure 702 becomesshorter. Similarly, as the inner hollow member 712 is rotated in asecond direction, the length of the adjustable hollow structure 702becomes longer.

In the illustrated embodiment shown in FIGS. 7-10 , the outer hollowmember 716 includes internal threads (helical grooves) 718, and theinner hollow member 712 includes a protrusion 714 (e.g., partial helicalprotrusion) that fits to the internal threads (helical grooves) 718during the rotating movement.

In some embodiments, the length of the adjustable hollow structure 702is adjusted by rotating the inner hollow member 712 using a motor (notshown) based on the configuration control signal from the controller300. In some embodiments, the motor (now shown) is driven by a fluxadjusting member driver 980 driven based on the configuration controlsignal from the controller 300.

FIG. 11 is a flow chart illustrating a method of cleaning the smartcollimator 500 according to various embodiments in the presentdisclosure.

Referring to FIG. 11 , the method of cleaning the smart collimator 500includes step S100 of determining the condition of the substrate processchamber 200, step S200 of positioning the substrate pedestal 202 in acleaning position, step S300 of positioning the shutter disk (not shown)on the substrate pedestal 202, step S400 of placing the substrateprocess chamber 200 in a chamber purging mode, step S500 of applying thevibration to the smart collimator 500, and step S600 of applying thescrubbing gas to the smart collimator 500.

Step S100 of determining the condition of the substrate process chamber200 includes a step of monitoring the condition of the substrate processchamber 200 and determining whether the condition of the substrateprocess chamber 200 is healthy based on the result from the monitoring.

In some embodiments of the present disclosure, the particle performanceof the substrate process chamber 200 is monitored to determine thecondition of the substrate process chamber 200. In non-limiting example,to measure the particle performance of substrate process chamber 200, aset of the mechanical dummy wafers can be cycled through the substrateprocess chamber 200. Based on the particle count result measured fromthe mechanical dummy wafers, the controller 300 determines the conditionof the substrate process chamber 200. As discussed above, in someembodiments, if the controller 300 determines that the particleperformance of the substrate process chamber 200 does not meet theparticle standard in the predetermined fabrication specification, thecontroller 300 transmits the scrubbing gas control signal and/orvibration control signal.

In some embodiments of the present disclosure, the uniformity of thethin film 904 deposited on the substrate 902 is measured. Based on theuniformity resulted measured from the substrate 902, the controller 300determines the condition of the substrate process chamber 200. Asdiscussed above, in some embodiments, if the controller 300 determinesthat the uniformity of the thin film 904 does not meet the uniformitystandard in the predetermined fabrication specification, the controller300 transmits the scrubbing gas control signal and/or vibration controlsignal.

In some embodiments of the present disclosure, one or more operatingconditions are monitored to determine the condition of the substrateprocess chamber 200 such as power on time of the substrate processchamber 200, plasma on time of the substrate process chamber 200, wafercounts from the last cleaning and/or replacement of the smart collimator500, the lifetime of the smart collimator 500, and any combinationsthereof. Based on the operating conditions, the controller 300determines the condition of the substrate process chamber 200.

Step S200 of positioning the substrate pedestal 202 in the cleaningposition includes positioning the substrate pedestal 202 in the cleaningpositon (e.g., lower position) and removing the substrate 902 from thesubstrate pedestal 202.

Step S300 of positioning a shutter disk (not shown) on the substratepedestal 202 includes covering the top surface of the substrate pedestal202 with the shutter disk to prevent the target material deposited onthe top surface of the substrate pedestal 202 from the smart collimator500 during the smart collimator cleaning procedure.

Step S400 of placing the substrate process chamber 200 in the chamberpurging mode includes having the substrate process chamber 200 in thechamber purging mode to purge out the target material that is removedfrom the smart collimator 500 during the smart collimator cleaningprocedure in Step S500 and/or Step S600. In some embodiments, Step S400and at least one of Step S500 or Step S600 are carried outsimultaneously. In some embodiments, Step S400 is carried out earlierbefore Step S400 and at least one of Step S500 or Step S600 are carriedout simultaneously. In some embodiments, Step S400 is carried outcontinuously after Step S400 and at least one of Step S500 or Step S600are carried out simultaneously. In accordance with certain embodiments,Step S500 and S600 are carried out in series or simultaneously. (e.g.,Step S500 and S600 are carried out in series in the chamber purgingmode)

Step S500 of applying the vibration to the smart collimator 500 includesgenerating vibration from the ultrasonic vibration generating units 950.As discussed above, the ultrasonic vibration generating units 950 areintegrated into the side walls that form the openings 504 in someembodiments of the present disclosure. In some embodiments, theultrasonic vibration generating units 950 are integrated into thecoupling locations 508. Any suitable ultrasonic vibration generatingunits 950 that can serve as electro-mechanical converters are used togenerate ultrasonic vibration at 20 kHz frequency or above. In someembodiments, the ultrasonic vibration generating units 950 includetransducers based on at least one piezoelectric material. In someembodiments, the ultrasonic vibration generating units 950 includetransducers based on at least one magnetic material or any othersuitable materials that can generate appropriate magnitude of vibrationthat can be used for cleaning. In some embodiments, the controller 300controls vibration time, magnitude of vibration and/or waveform ofvibration for each of the ultrasonic vibration generating units 950 bytransmitting the vibration control signal to the vibration driver 970.

Step S600 of applying the scrubbing gas to the smart collimator 500includes directing scrubbing gas to the inner sides of the passages inthe smart collimator 500. As discussed above, in some embodiments, thecontroller 300 controls scrubbing gas supplied to the inner sides of thepassages in the smart collimator 500 based on flow rate (e.g., standardcubic centimeters per minute) and flow time by transmitting thescrubbing gas control signal to the mass flow controller (MFC) 960. Thetype and amount of the scrubbing gas is chosen to promote removal oftarget material accumulated on the inner sides of the passages in thesmart collimator 500. In accordance with certain embodiments, Step S500and S600 are carried out in series or simultaneously. In someembodiments, Step S500 is carried out first when Step S500 and S600 arecarried out in series. In some embodiments, Step S600 is carried outfirst when Step S500 and S600 are carried out in series.

As discussed above, the controller 300 determines the above steps usingone or more artificial intelligence techniques.

FIG. 12 is a flow chart illustrating a method of adjusting each of theadjustable hollow structures 702 based on the aspect ratio of gap on thesubstrate 902 according to one or more embodiments in the presentdisclosure.

Referring to FIG. 12 , the method of adjusting each of the adjustablehollow structure 702 includes step S1000 of obtaining the aspect ratioof gap on the substrate 902, step S1100 of determining the respectivelength for each of the adjustable hollow structure 702 based on the gapaspect ratio information obtained, and step S1200 of adjusting therespective length for each of the adjustable hollow structures 702 forthe substrate 902.

Step S1000 of obtaining the aspect ratio of gap on the substrate 902includes a step of obtaining the aspect ratio from the AMHS. In someembodiments, the controller 300 obtains the aspect ratio informationbased on process recipe running for the substrate 902. In someembodiments, the controller 300 receives the aspect ratio informationfrom a metrology tool or measurement device located within thedeposition system 100.

Step S1100 of determining the respective length for each of theadjustable hollow structures 702 based on the aspect ratio informationincludes a step of determining suitable length for each of theadjustable hollow structures 702 based on the aspect ratio informationfor the gap structures on the substrate 902. As discussed above, thecontroller 300 determines the respective length for each of theadjustable hollow structures 702 using one or more artificialintelligence techniques.

Step S1200 of adjusting the respective length for each of the adjustablehollow structures 702 for the substrate 902 includes a step of adjustingthe respective length for each of the adjustable hollow structures 702according to the determined suitable lengths. In some embodiments, thecontroller 300 transmits the configuration control signal to the fluxadjusting member driver 980 to adjust the length for each of theadjustable hollow structures 702.

Utilizing the scrubbing gas and ultrasonic vibration for cleaning thesmart collimator 500 will produce a substantial cost savings byimproving the uniformity of the thin film 904 deposited in the substrateprocess chamber 200, particle performance of the substrate processchamber 200, and production throughput.

According to one or more embodiments of the present disclosure, a methodof depositing a material from a target onto a substrate in a substrateprocess chamber includes determining a condition of the substrateprocess chamber. The method includes placing the substrate processchamber in a chamber purging mode. The method includes applyingvibration to a collimator. The method further includes applyingscrubbing gas to the smart collimator.

According to one or more embodiments of the present disclosure, adeposition system includes a substrate process chamber, a substratepedestal in the substrate process chamber, the substrate pedestalconfigured to support a substrate, a target enclosing the substrateprocess chamber, a collimator having a plurality of hollow structuresdisposed between the target and the substrate; and a plurality ofcleaning gas outlets within the collimator.

According to one or more embodiments of the present disclosure, adeposition system includes a collimator having a plurality of hollowstructures disposed between a target and a substrate pedestal, at leastone cleaning gas outlet within the collimator; and at least onevibration generating unit configured to provide vibration to thecollimator, wherein cleaning gas released from the cleaning gas outletand the vibration provided to the collimator are used to clean a surfaceof the collimator.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

1. A deposition system, comprising: a substrate process chamber; asubstrate pedestal in the substrate process chamber, the substratepedestal configured to support a substrate; a target enclosing thesubstrate process chamber; a collimator having a plurality of hollowstructures disposed between the target and the substrate pedestal; and aplurality of cleaning gas outlets within the collimator.
 2. Thedeposition system according to claim 1, further comprising amicrochannel within the collimator, the microchannel connected betweenat least one of the cleaning gas outlets and a scrubbing gas receivingport.
 3. The deposition system according to claim 1, wherein each of thehollow structures has an inner surface surrounding a hollow space, andwherein at least one of the cleaning gas outlets is disposed on a firstportion of the inner surface.
 4. The deposition system according toclaim 3, wherein the at least one of the cleaning gas outlets is facinga second portion of the inner surface.
 5. The deposition systemaccording to claim 1, further comprising a mass flow controller forcontrolling an amount of cleaning gas released from the plurality ofcleaning gas outlets.
 6. The deposition system according to claim 1,further comprising a vibration generating unit within the collimator. 7.The deposition system according to claim 6, wherein the vibrationgenerating unit includes an electro-mechanical converter which isconfigured to vibrate.
 8. The deposition system according to claim 1,further comprising a flux adjusting member having a plurality ofadjustable hollow structures disposed between the collimator and thesubstrate pedestal.
 9. The deposition system according to claim 8,wherein the at least one of the plurality of adjustable hollowstructures includes a first hollow member and a second hollow member,the first hollow member and the second hollow member at least partiallyoverlapped with each other.
 10. The deposition system according to claim9, wherein the first hollow member includes an internal helical groove,and wherein the second hollow member includes a helical protrusion thatfits into the internal helical groove.
 11. The deposition systemaccording to claim 8, wherein the plurality of adjustable hollowstructures is configured to extend or to retract in a linear direction.12. The deposition system according to claim 8, further comprising acontroller that controls a length of each of the adjustable hollowstructures based on at least one of target profile measurement data,aspect ratio of a gap pattern on the substrate, or thin film thicknessmeasurement.
 13. The deposition system according to claim 8, wherein acontroller determines a length for each of the adjustable hollowstructures based on at least one artificial intelligence method.
 14. Adeposition system, comprising: a collimator having a plurality of hollowstructures disposed between a target and a substrate pedestal; at leastone cleaning gas outlet within the collimator; and at least onevibration generating unit, wherein cleaning gas released from thecleaning gas outlet impinges on the hollow structures and the vibrationgenerating unit vibrates the collimator.
 15. The deposition systemaccording to claim 14, wherein the vibration generating unit is disposedwithin the collimator.
 16. The deposition system according to claim 14,further comprising a microchannel within in the collimator, themicrochannel connected between the cleaning gas outlet and a cleaninggas source.
 17. The deposition system according to claim 14, furthercomprising a controller controlling an amount of cleaning gas releasedfrom the cleaning gas outlet and the vibration provided to thecollimator based on an at least one artificial intelligence method.18-20. (canceled)
 21. A deposition system, comprising: a substrateprocess chamber; a substrate pedestal in the substrate process chamber,the substrate pedestal configured to support a substrate; a targetenclosing the substrate process chamber; a first collimator having aplurality of first hollow structures disposed between the target and thesubstrate; a second collimator having a plurality of second hollowstructures disposed between the target and the substrate pedestal anddisposed between the first collimator and the substrate pedestal; aplurality of first cleaning gas outlets within the first collimator; anda plurality of second cleaning gas outlets within the second collimator.22. The deposition system according to claim 21, wherein respectivesecond hollow structures of the plurality of second hollow structures ofthe second collimator are aligned with corresponding respective firsthollow structures of the plurality of first hollow structure of thefirst collimator.
 23. The deposition system according to claim 21,wherein: the first collimator further includes at least one firstmicrochannel that is in fluid communication with at least one respectivefirst cleaning gas outlet of the plurality of first cleaning gas outletsof the first collimator; and the second collimator further includes atleast one second microchannel that is in fluid communication with atleast one respective second cleaning gas outlet of the plurality ofsecond cleaning gas outlets of the second collimator.